Physical & Electronic Properties
The physical and electronic properties of SiC make it the foremost
semiconductor material for short wavelength optoelectronic, high temperature,
radiation resistant, and high-power/high-frequency electronic devices. A summary
of the most important properties in comparison to Si and GaAs is shown below:
Wide Energy
Bandgap (eV)
|
4H-SiC: 3.26
|
6H-SiC: 3.03
|
GaAs: 1.43
|
Si: 1.12
|
Electronic devices formed in SiC can operate at extremely high
temperatures without suffering from intrinsic conduction effects because of
the wide energy bandgap. Also, this property allows SiC to emit and detect
short wavelength light which makes the fabrication of blue light emitting
diodes and nearly solar blind UV photodetectors possible.
|
High Breakdown
Electric Field [V/cm (for 1000 V operation)]
|
4H-SiC: 2.2 x 106*
|
6H-SiC: 2.4 x 106*
|
GaAs: 3 x 105
|
Si: 2.5 x 105
|
SiC can withstand a voltage gradient (or electric field) over eight
times greater than than Si or GaAs without undergoing avalanche breakdown.
This high breakdown electric field enables the fabrication of very
high-voltage, high-power devices such as diodes, power transitors, power
thyristors and surge suppressors, as well as high power microwave devices.
Additionally, it allows the devices to be placed very close together,
providing high device packing density for integrated circuits.
|
High Thermal
Conductivity (W/cm · K @ RT)
|
4H-SiC: 3.0-3.8
|
6H-SiC: 3.0-3.8
|
GaAs: 0.5
|
Si: 1.5
|
SiC is an excellent thermal conductor. Heat will flow more readily
through SiC than other semiconductor materials. In fact, at room temperature,
SiC has a higher thermal conductivity than any metal. This property enables
SiC devices to operate at extremely high power levels and still dissipate the
large amounts of excess heat generated.
|
High Saturated
Electron Drift Velocity [cm/sec (@ E 2 x 105 V/cm)]
|
4H-SiC: 2.0 x 107 |
6H-SiC: 2.0 x 107
|
GaAs: 1.0 x 107 |
Si: 1.0 x 107
|
SiC devices can operate at high frequencies (RF and microwave) because
of the high saturated electron drift velocity of SiC.
|
Collectively,
these properties allow SiC devices to offer tremendous benefits over other
available semicondutor devices in a large number of industrial and military
applications.
* Measurement parallel to c-axis.
Applications and Benefits for Devices Fabricated From
4H-SiC and 6H-SiC
Substrates
APPLICATIONS
|
BENEFITS
|
HIGH FREQUENCY POWER DEVICE (RECOMMENDED
MATERIAL: 4H-SiC)
|
· Solid state phased
array radar systems
|
· Increase output
power of solid state RF devices by factor of 4
|
· Communication
Systems
|
· Reduce system
weight and volume
|
· Solid state UHF
broadcast systems
|
· Operate in
elevated temperature and high radiation environments
|
· High frequency
power supplies
|
· Reduce device
cooling requirements
|
· Electronic
countermeasures- jamming and threat warning systems
|
· Offer power
densities that are 4 times higher than Si or GaAs devices
|
HIGH POWER DEVICES (RECOMMENDED
MATERIAL: 4H-SiC)
|
· Power electronics
for power generating systems
|
· Lower voltage drop
for unipolar devices
|
· Surge suppressors
|
· Up to 100 times
the power density of Si devices
|
· Power conditioning
for electric vehicles
|
· Increased number
of power devices per unit area
|
· Electronic
actuators
|
· Reduced size and
weight of cooling systems
|
· Solid state lamp
ballasts
|
· Excellent
transient characteristics including high switching speed and the elimination
of large reverse-recovery currents
|
HIGH TEMPERATURE DEVICES
|
· Jet engine
sensors, actuators and control electronics
|
· Sensor output
signal amplification at high temperatures
|
· Spacecraft power
conditioning electronics and sensors
|
· Reduce or
eliminate need for cooling of engine electronics
|
· Transmitters for
deep well drilling
|
· Aircraft weight
savings - sensor amplification at point of measurement eliminates need for
heavy shielding conduit for small signal transmission
|
· Industrial process
measurement and control instrumentation
|
· Reliable sensing
and control in aggressive environments not currently served by solid-state
electronics
|
· Distributorless
electronic ignitions
|
· Reduce size and
weight of satellites and space platforms by allowing electronics to operate
at higher temperature
|
· Automotive engine
sensors
|
· Improved device
reliability due to long term chemical and thermal stability at elevated
temperatures
|
OPTOELECTRONIC DEVICES
|
· Full-color
displays
|
· High reliability
|
· Full-color
photographic slide scanners and film exposure systems
|
· Blue LEDs used
together with red and green LEDs allow the production of solid state light of
any color in the visible spectrum
|
· Indicators for
instrumentation and consumer electronics
|
· Detectors operate
at >350ºC while maintaining excellent efficiency
|
· Blood-oxygen
analysis
|
· Nearly solar blind
detection (99% of the response is in the UV range)
|
· Air quality
monitoring equipment
|
· PN junction
leakage currents 104 - 105 times less than Si junctions
for sensitivity up to 10,000 times greater than common Si based UV
photodetectors
|
· Solid state flame
detectors for combustion control
|
· Low dark current
eliminates need for cryogenic cooling
|
· UV dosimetry for
industrial processes
|
· UV spectroscopy
|
· Incoming ballistic
missile detection and imagine
|
|
III - V NITRIDE DEPOSITION
|
|
· Blue LEDs
|
· Close match of
lattice parameters and coefficient
|
· Blue laser diodes
|
· High thermal
conductivity substrate offers greater power handling and improved
reliability.
|
· MESFETs
|
· Electrical
conductivity allows vertical device structure
|
· HEMTs
|
· Best technological
approach for short wavelength laser diodes, which significantly increase
optical storage capacities
|
· Green LEDs
|
· Electrical
conductivity which ranges from insulating for microwave devices to conducting
for LEDs and laser diodes
|
· UV Emitters
|
· HBTs
|
|