1. Quartz wafer Spec 결정 시 고려할 내용

1. Quartz Size : 2” , 3” , 4” , 5” , 6” , 8” , Square Type 예>10mm*10mm
2. Thcikness : 0.5T , 1.0T  기타 원하시는 Thickness 100u,
3. Flat : Round , 1Flat , 2Flat
4. Surface Finished : Double Side Polished
5. Grade : UV Grade

2. Quartz wafer 특성표
 

Electrical Property
Property	Fused Quartz		Fused Silica
	Electric Fused	Flame Fused	Standard	Semi Dry	Dry	Very Dry
Dielectric Constant 25℃ @ 24Ghz	3.8	3.82	3.8	3.8	3.8	3.8
Dielectric Constant 500℃ @ 60Ghz	3.8	3.72	3.72	3.72	3.72	3.72
Dielectric Strength @25℃ kV/cm	34	32	34	36	39	40
Dielectric Strength @500℃ kV/cm	16	12	16	16	16	17
Loss Tangent 25℃ @ 24Ghz	1 X 10-4	3 X 10-4	3 X 10-4	3 X 10-4	3 X 10-4	3 X 10-4
Lose Tangent 25℃ @60Ghz	1 X 10-4	7 X 10-4	7 X 10-4	7 X 10-4	7 X 10-4	7 X 10-4

3. Quartz wafer로 가능한 추가 공정

- Sputtering , Evaporation을 통한 Metal Deposition Process
- Patterning Process
- Hole 가공
- PECVD를 통한 SiO2 , Si3N4 Deposition Process
- Si위에 Quartz bonding Process
- CMP로 두께 조절 및 Dicing으로 사이즈 조절